Specification and model PHOENIX QuadrO TRIVAC D2.5E

The minimum detectable helium leakage rate in vacuum mode is 5x10-12mbar L/S

Response time<1s

Maximum inlet pressure 15 mbar

Helium extraction speed ULTRA>3.1 L/S

Detectable gases 4He, H2, mass number 3

The minimum detectable helium leakage rate in suction mode is 1x10-8smbar L/S

The air flow rate of the SL300 suction gun is 20-25 sccm

Measurement range of 12 orders of magnitude

Start time 110 seconds

Ion source dual filament