Main technical specifications
Minimum detectable leak rate (vacuum mode) 5X10-13 Pa.m3/s
Minimum detectable leak rate (suction gun mode) 5X10-10Pa.m3/s
Detect gases 4He, 3He, H2
Start time 3 minutes
Extraction speed of helium gas is 2.5L/s
Inlet pressure 25hPa
Front stage pump pumping speed oil pump 15 m3/h