After nearly half a century of effort, today's helium mass spectrometer leak detectors have bid farewell to the situation in the early 1940s.
This is mainly reflected in the following aspects:
(1) Portable: Recently, small portable leak detectors launched by various countries not only have high sensitivity, but are also easy to carry, providing great convenience for field and high-altitude operations.
(2) Leak detection under high pressure: The pressure at the leak detection port can reach up to several hundred pascals, which is very beneficial for detecting large systems and workpieces with large leaks.
(3) High degree of automation: automatic calibration of helium peak, automatic adjustment of zero point, automatic range conversion, automatic data processing, and can be connected to an external printer. The whole machine is controlled by a microcomputer, with menu selection functions and one button to complete a full leak detection process.
(4) Oil free dry leak detection: Some countries produce leak detectors that can use dry pumps to achieve the effect of no oil vapor, providing favorable conditions for leak detection of oil-free systems and semiconductor devices such as chips.
(5) Wide range of leak detection: The quadrupole leak detector produced today has a wide quality range, which can not only detect helium gas, but also other gases. The molecular pump exhaust system replaces the diffusion pump exhaust system, which not only solves the pollution problem of oil vapor on the mass spectrometry chamber, but also makes a great contribution to the rapid start-up and shutdown of instruments. To adapt to changes in leak detection port pressure and different sensitivity requirements, molecular pumps generally adopt a multi-stage structure and several different rotational speeds.